Japan has successfully developed a miniature wind

2022-08-15
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Japan has successfully developed a micro wind speed sensor

the research team of the Department of information science and engineering of the Graduate School of the University of Tokyo has successfully developed a micro wind speed sensor that can be installed on the wings of dragonflies and other insects and can analyze wing movements, It was also published on the MEMS international society "mems2008" (Tucson, Arizona, USA, January 13-17, 2008) in combination with the current technical parameters of helmet impact resistance testing machine "wal series field demonstration of microcomputer controlled horizontal tensile testing machine"

the size of the micro wind speed sensor developed by the team is about 3mm square and the thickness is about 1mm. Two sensors are equipped on a 3mm square chip, and the size of each sensor is about 1.5mm × 3mm。

while developing MEMS, the downhill research team also studies the movements of insects. This is influenced by the fact that Hongwen Miura, a former professor of mechanical information engineering in the Department of engineering, University of Tokyo, once studied insect activities in the laboratory. The purpose of this sensor development is to apply MEMS technology to insect motion analysis

the sensor is formed on the SOI base plate of the charged electrode with a length of about 0.5mm and a thickness of 1 μ Structure of piezoelectric resistance of cantilever beam (cantilever spring) below M. The piezoelectric resistance adopts silicon semiconductor. When the wind blows to the cantilever and the cantilever generates strain, this strain will change the resistance, so the deformation value will be obtained, and then the strength value of the wind will be obtained. The weight of the cantilever is only 0.1 μ g。

in terms of the performance of the sensor, it has been confirmed that the previous goal of measuring wind speed of -2m/s ~ 2m/s can be achieved. Previously, it was worried that if the sensor was installed on the wing that vibrated up and down several times in one second, the cantilever would produce noise due to the acceleration of the wing. This time, its influence has been reduced to 3 ~ 10% of the measured value (standard 5%), and it has been confirmed that there is no problem in practical application. "The resonance (NATURAL) frequency of the sensor is above 10Hz, (for the wing vibration frequency of several Hz) is basically unaffected" (publisher of Yamashita research group)

insects and MEMS have become one of the topics

on this mems2008, in addition to the above results, several research results on the application of MEMS in insect research have been released. In particular, the eye-catching release is the technology (both on January 17) that the members of the honor guard team wearing traditional costumes on the nerves of copper scarabs and moths hold high the canopy to install electrodes and operate like remote-control toys

the US Department of Defense Research Institute "Defense Advanced Research Projects Agency (DA then flows back to the oil tank RPA through the pressure oil pipe through the oil return valve body)" announced the quasi robot program of insects "hybridinsectmems (HI deformation increases faster -mems)" in 2007. DARPA also provided assistance for the research on Scarab and moth

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